发明名称 METHOD FOR MACHINING ELEMENT WITH MULTIPLE SURFACES AND METHOD FOR MACHINING SLIDER
摘要 <p>PROBLEM TO BE SOLVED: To provide the machining method which can actualize various elements such as a slider which is free of a defect in operation, etc., due to contamination when used and usable with high reliability by solving the problem of low deterioration in profile precision and the problem of contamination generation resulting from the roughness or chipping of a cut surface. SOLUTION: A wire saw composed of a wire 103 having a diameter larger than the width of a part cut in a 1st cutting process, i.e., the width of a cut groove 204 is made to abut against the part of the cut groove 204 of a bar 201. While the wire saw is slid along the length, the bar 201 is sliced along the thickness to the overall thickness of the bar 201. Consequently, while the bar 201 is cut, the final cut surface 206 formed by the cutting is smoothed.</p>
申请公布号 JP2000298818(A) 申请公布日期 2000.10.24
申请号 JP19990103627 申请日期 1999.04.12
申请人 TDK CORP 发明人 FUKUROI OSAMU;FUJII TAKASHI
分类号 B24B27/06;B24B21/00;G11B5/31;G11B5/60;G11B7/00;H01L21/301;(IPC1-7):G11B5/60 主分类号 B24B27/06
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