| 摘要 |
PROBLEM TO BE SOLVED: To attain higher efficiency of electrode work by forming, to an element substrate, a plurality of whole grooves reaching an isolation layer from the surface of an element layer and a plurality of half-grooves stopping at the inside of the element layer and the dividing the element layer to the sheets coupled in parallel at one end of a plurality of rectangular elements where a plurality of head elements are coupled via the half-grooves. SOLUTION: In the process to expose an Au pad 16c formed in a device sheet 26, the device sheet 26 isolated from an element plate is fixed on a fixing jig 40 via a bonding agent 42 with the surface where the magnetic pole pad 54 is formed located lower side. Next, the fixing jig 40 loading the device sheet 26 is put into the etching device and an insulation layer at the surface of device sheet 26 is removed with the etching process. At the surface of each head element 50a included in the device sheet 26, the Au pad 16c is exposed for the bonding of suspension 58. The working time can be shortened by exposing the Au pad 16c depending on the condition of device sheet 26.
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