| 摘要 |
PROBLEM TO BE SOLVED: To efficiently execute heating with a simple structure and to make excellent its reliability by combining plural heating systems, heating and melting the material for forming hyperfine particles to vaporize it and forming hyper-fine particles. SOLUTION: In the case, as plural heating systems, a laser heating system (laser light irradiating device) and a high frequency induction heating system (induction heating power source) are jointly used, a crucible 12 in a hyperfine particle forming chamber 1 is fillted with Ti chips, and high frequency heating is executed by an induction heating power source 13 to melt the chips. Then, the high frequency heating is continued, and Ti in a melted state is irradiated with an Nd-YAG laser from a laser body 16 outside of the hyperfine particle forming chamber 1. The introduction of the laser light is executed through a laser light introducing window 11 applid with antireflection coating, the generated material vapor is carried on carrier gas of He, is transferred to the hyperfine particle film forming chamber by the differential pressure and is jetted from the tip of a nozzle to form a hyperfine particle film on a substrate. When plural heating systems are jointly used, the material is heated to a higher temp., and the total amt. to be evaporated increases as well.
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