发明名称 ENERGY DETECTING DEVICE, THERMAL FUNCTION DEVICE AND DRIVING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a thermal function device of higher thermal reaction speed at lower price and smaller size. SOLUTION: When an infrared ray is irradiated toward a diaphragm 2, a heat is generated to increase the output of a thermoelectric conversion element 4. Since a reference thermoelectric conversion element 5 is not irradiated with infrared ray, an output signal does not change. A difference between both outputs is detected at a calculation amplifier 19, which is amplified and outputted as a compensation signal. The compensation signal is supplied to a measuring device 21 through a noise filter 20. The measuring device 21 calculates the infrared ray irradiation amount and heating amount of the diaphragm 2 from the compensation signal. At the same time, the compensation signal is supplied to a thermoelectric conversion means 3. Supplied with the compensation signal, the thermoelectric conversion element 3 so operates as to cancel the energy application to the diaphragm 2, resulting in a constant temperature.
申请公布号 JP2000298062(A) 申请公布日期 2000.10.24
申请号 JP19990106770 申请日期 1999.04.14
申请人 NEC CORP 发明人 TANAKA AKIO
分类号 H01L35/00;G01J1/02;G01J5/06;G01J5/12;G01J5/16;H01L27/14;H01L35/14;H01L35/16;H01L35/32;H01L37/00;H01L37/02;(IPC1-7):G01J1/02 主分类号 H01L35/00
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