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发明名称
Abatement of nf3 using small particle fluidized bed
摘要
申请公布号
SG75866(A1)
申请公布日期
2000.10.24
申请号
SG19980002900
申请日期
1998.08.03
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
HSIUNG THOMAS HSIAO-LING;WITHERS, HOWARD PAUL, JR.
分类号
B01D53/14;B01D53/68;(IPC1-7):B01D53/68;B01D53/86
主分类号
B01D53/14
代理机构
代理人
主权项
地址
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