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发明名称
Polishing solution supply system
摘要
申请公布号
SG75889(A1)
申请公布日期
2000.10.24
申请号
SG19980004391
申请日期
1998.10.30
申请人
EBARA CORPORATION
发明人
KAWASHIMA KIYOTAKA
分类号
B24B37/04;B24B57/02;H01L21/304;(IPC1-7):B24B57/00
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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