发明名称 LOT AUTOMATIC TRANSFER SYSTEM AND LOT TRANSFER CONTROL METHOD
摘要 <p>PROBLEM TO BE SOLVED: To enable lots to be fed uniformly to various devices arranged on a production line in a shorter waiting time and to uniformly recover already processed lots by the devices to be in a shorter waiting time. SOLUTION: This lot automatic transfer system is equipped with at least one or more intra-process transfer systems, which have functions to feed lots delivered from automatic shelves and automatic shelves, where devices are arranged to the devices and to recover lots kept at the devices and transfer them to the automatic shelves, an interprocess transfer system which connects automatic shelves together and transfers the lots delivered from an automatic shelf to another automatic shelf, a lot transfer control device which indicates to an automatic shelf to deliver specific lots and also indicates the destinations of lots to the interprocess transfer system and the intra-process transfer system, and a lot progress control device which grasps the processing flow and current position of a lot.</p>
申请公布号 JP2000299264(A) 申请公布日期 2000.10.24
申请号 JP19990106924 申请日期 1999.04.14
申请人 NEC CORP 发明人 KONDO HIROSHI
分类号 B65G1/137;H01L21/02;(IPC1-7):H01L21/02 主分类号 B65G1/137
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