METHOD AND DEVICE FOR INSPECTING DEFECT OF COLOR FILTER

摘要

PROBLEM TO BE SOLVED: To provide a method and device for inspecting defects of a color filter with a bright image. SOLUTION: A color filter sample 6 with a repeated pattern of colored/ translucent thin film is irradiated with a convergence light which converges on almost one point adjusted by an optical device, and space filters 9 and 12 provided in a plane comprising a point on which the transmission light or reflection light converges selectively allow a part of diffraction image formed with the transmission light or reflection light, so that a defective part is detected by noticing the abnormality of an image acquired by imaging the light which has transmitted through the space filters 9 and 12 with imaging optical means 10 and 13.