| 摘要 |
PROBLEM TO BE SOLVED: To provide a supersensitive composite piezoelectric ultrasonic probe integrated with an electric circuit allowing miniaturization, and provide a manufacturing method therefor. SOLUTION: In this probe 1, a pulse voltage is applied to electrodes 21, 22 through a cable from the outside. The pulse voltage passes through a chip 25 and a wiring electrode 24, and is applied to a first electrode 5 of an ultrasonic probe part 2. A composite piezoelectric part 6 applied with the voltage oscillates by an inverse piezoelectric effect to generate ultrasonic waves. The generated ultrasonic waves pass through a matching layer 8, is radiated form a lens 9 surface, is reflected by a reflector, and is incident on the lens 9 surface again. The incident ultrasonic waves excite a voltage in the composite piezoelectric part 6 by a piezoelectric effect. The excided voltage is inputted into the chip 25 through the wiring electrode 24. The excited voltage is amplified in the chip 25, and is transmitted to the cable. The transmitted voltage signal is inputted into an ultrasonic diagnostic device. By sequentially radiating the ultrasonic waves with rotating the probe 1, an image in all directions perpendicular to the axis can be displayed.
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