| 摘要 |
PROBLEM TO BE SOLVED: To form a conductive amorphous thin film having a uniform molecular level on the surface and to prevent the deterioration of resolution by including a coating process applying the coating of the amorphous thin film of osmium to a metal plate bored with fine holes. SOLUTION: The gas in the vacuum container 21 of a coating device 20 is first exhausted in a coating process. For applying coating to the surface of a throttle plate 18, a cleaning process is sufficiently made as a pre-process, and the degree of vacuum of 10-4-10-5 Torr is secured by an oil diffusion pump 25. An inert gas such as argon gas 26 is injected after exhaustion, then it is again exhausted to further reduce the concentration of oxygen and steam. Osmium tetroxide is used as a coating metal. The surface of the throttle plate 18 is coated with a hard osmium amorphous thin film having good conductivity, thus high resolution is obtained when it is used for an electron microscope.
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