Method and fixture for mounting process equipment

摘要

A method for earthquake-proof mounting a semiconductor process machine on a removable floor (or a raised floor) in a semiconductor fabrication plant. In the method, a modified I-beam which has a horizontally extending upper flange is provided for mounting under a removable floor and attaching through the floor directly to a process machine situated on top of the floor. The process machine may be attached to the modified I-beam through an L-shaped bracket that is attached to the support frame of the process machine with the horizontal flange of the bracket attached to the modified I-beam through apertures in the removable floor. The present invention further comprises an earthquake-proof mounting fixture for mounting a process machine on a removable floor in a semiconductor fabrication plant. The mounting fixture consists of essentially a modified I-beam for supporting the removable floor on a non-removable floor, the I-beam is equipped with a horizontally extending upper flange for attaching to the process machine directly through the removable floor. The present invention novel method and apparatus allows a process machine to be mounted on a removable floor in a fabrication plant to meet seismic prevention regulations imposed by government agencies for environmental protection and occupational safety. The present invention novel apparatus is especially suitable for use in mounting process machines that holds hazardous, corrosive chemicals for preventing chemicals from spilling during an earthquake, especially when the process machine is mounted on a higher floor in the plant.