发明名称 Bonding and inspection system
摘要 A system and method that permits the accuracy of alignment of a transparent substrate relative to a second substrate to which it is bonded to be evaluated on-line, after the two substrates have been bonded together. The alignment of the two substrates is viewed through the transparent substrate as the bonded-together substrates are being transported between the station at which the bonding occurred and another processing station.
申请公布号 US6135340(A) 申请公布日期 2000.10.24
申请号 US19990392819 申请日期 1999.09.09
申请人 MICRON TECHNOLOGY, INC. 发明人 STANSBURY, DARYL M.
分类号 H01J9/24;(IPC1-7):B23K37/04;B23Q16/00 主分类号 H01J9/24
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