| 摘要 |
PROBLEM TO BE SOLVED: To provide a handling device which can remove the lid unit, etc., of a handling chamber, for example and carry components to an area adjacent to a semiconductor manufacturing device. SOLUTION: This device is provided with a guide rail 12 arranged on top of a semiconductor manufacturing device 5, a running body 14 movably attached to the guide rail 12, a horizontal arm 20 rotatably mounted on the running body 14, a lifting wire whose one end hangs from the free end of the horizontal arm 20 and the other end is extended to the running body, a wire winding electric driving means and a tool 46 to connect components and the wire. In this constitution, the components are lifted by a electric driving. In addition, the running body 14 can be made to run and the horizontal arm 20 can be turned by light force. Therefore, a heavy lid unit can be handled by even only one operator.
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