发明名称 Integrated manufacturing packaging process
摘要 A process of fabricating a circuitized substrate is provided which comprising the steps of: providing an organic substrate having circuitry thereon; applying a dielectric film on the organic substrate; forming microvias in said dielectric film; sputtering a metal seed layer on the dielectric film and in said microvias; plating a metallic layer on the metal seed layer; and forming a circuit pattern thereon.
申请公布号 SG75906(A1) 申请公布日期 2000.10.24
申请号 SG19980005900 申请日期 1998.12.22
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 JONES GERALD WALTER;KEESLER ROSS WILLIAM;MARKOVICH VOYA RISTA;RUDIK WILLIAM JOHN;WILSON JAMES WARREN;WILSON WILLIAM EARL
分类号 H01L21/48;H05K3/00;H05K3/16;H05K3/38;H05K3/46;(IPC1-7):H05K3/00 主分类号 H01L21/48
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