Electrostatically focused addressable field emission array chips (afea's) for high-speed massively parallel maskless digital e-beam direct write lithography andscanning electron microscopy

摘要

Systems and method are described for addressable field emission array (AFEA) chips. A plurality of individually addressable cathodes are integrated with an electrostatic focusing stack and/or a plurality of detectors on the addressable field emission array. The systems and methods provide advantages including the avoidance of space-charge blow-up.