| 摘要 |
The microetching device (20) comprises an etching tip (30) for marking a substrate, an arm (28) which can be introduced between the substrate and a microscope lens (10), and a means (26) for generating a high frequency, low amplitude oscillating movement and transferring it to the etching tip. This tip is mounted on the arm and in the correct position does not interfere with the field of vision. - An INDEPENDENT CLAIM is also included for a method for marking a cut substrate by microetching and in combination with light spectroscopy, using this device. |
