GAS FEEDER, GAS MIXING BLOCK USED BY THE GAS FEEDER, FEED GAS SWITCH BLOCK, PROCESS BLOCK, AND VENT BLOCK

摘要

PROBLEM TO BE SOLVED: To obtain the gas high in purity by removing impurities contained in the gas. SOLUTION: A gas feed device comprises a gas transfer passage to transfer the gas fed from a plurality of gas feed passages, valves (AV1-DV1+AV2-DV2) to be switched and operated between the gas transfer position to communicate each gas feed passage with the gas transfer passage and the gas discharge position to be communicated with a gas discharge passage, an impurity removing device which is arranged in the gas feed passage and has gas refining metals A26-D26 in which impurities in the surface are desorbed when the metals are heated, and the impurities are adsorbed in the surface, and a refining metal heating device to heat the gas refining metals A26-D26, and a heating device control means which heats the gas refining metals A26-D26 by the refining metal heating device for the specified time while feeding the feed gas before the feed gas is used to remove the impurities in the gas refining metal surface.