| 摘要 |
PROBLEM TO BE SOLVED: To reduce power consumption, and simultaneously to aim shortening of a response time and secureness of gas sensitivity. SOLUTION: This sensor is so composed that a heater layer 1 is formed on a substrate surface formed by hollowing out a one-side surface center part of a Si substrate into a diaphragm shape, through a support layer, and that an electrode (sensing film electrode 4) is formed thereon through an electrical insulating layer, and that a gas sensing film 5 is formed thereon furthermore. In this case, a response time can be reduced within a prescribed time, by forming a heat generating part including the gas sensing film 5 in a size within a circle having a radius of 100μm. And, power consumption can be reduced within a prescribed value, by forming the gas sensing film 5 in a size within a circle having a diameter of a half of the diaphragm diameter.
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