| 摘要 |
PROBLEM TO BE SOLVED: To extend the scanning range and shorten the scanning time by providing a plurality of probes, providing a Z-directional driving mechanism on the respective probes, and mounting each Z-directional driving mechanism on a common X-Y driving mechanism. SOLUTION: The tunnel current carried to a probe 8 is detected and supplied to a feedback circuit 17 through an amplifier 16. The feedback circuit 17 controls a Z-driving mechanism 5 so that the tunnel current of the probe 8 is constant. Consequently, the Z-directional position of the probe 8 is changed according to the irregular state of a sample surface. On the other hand, the tunnel current of a probe 10 is supplied to a feedback circuit 19 through an amplifier 18, and the Z-directional position of the probe 10 is similarly changed according to the irregular state of the sample surface. The signals corresponding to the Z-directional positions of the probes 8 and 10 are supplied from the feedback circuits 17 and 19 to a computer 20, which then supplies each Z- directional position change signal of the probe 8 and the probe 10 to a display device 21 and an image signal conformed to the irregularities on the sample surface. Consequently, the irregular image of a sample 1 is displayed on the display device 21 over the area 2 times a conventional one.
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