| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing ultrahigh purity gas capable of highly maintaining purity of the gas with an advantageous cost and simple constitution. SOLUTION: The method for manufacturing ultrahigh purity gas comprises the steps of refining previously refined raw fluid by a first fractionating tower 10, by introducing the obtained high purity gas into a second fractionating tower 20 to further refine the gas to manufacture the ultrahigh purity gas. A part of the circulating liquid in a top of the tower is guided from a supply unit of the fluid of the first tower 10 to a top of the second tower 20 while regulating its flow rate as its circulating liquid, the gas in the top is recovered to a fractionating unit 21 of the second tower 20 or the substance from the bottom is recovered while returning the gas in the top to the top of the first tower 10.
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