发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE, MOLD FOR MANUFACTURING THE SEMICONDUCTOR DEVICE, THE SEMICONDUCTOR DEVICE AND MOUNTING METHOD THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To improve manufacturing efficiency and reliability of a semiconductor device, in a method of manufacturing a semiconductor device having a chip-size package structure, and a mold for manufacturing the semiconductor device, and the semiconductor and mounting method thereof. SOLUTION: This method of manufacturing a semiconductor device has a resin-sealing process, in which a substrate 16 with a plurality of semiconductor devices on which bumps 12 are disposed, is installed in a cavity 28 of a mold 20, the positions of the disposal of the bumps 12 are supplied with a resin 35 to seal the bumps 12 and a resin layer 13 is formed, a bump-electrode exposure process in which at least the front end sections of the bumps 12 covered with the resin layer 13 are exposed from the resin layer 13, and a separation process, in which the substrate 16 is cut together with the resin layer 13 and separated into individual semiconductor elements.</p>
申请公布号 JP2000294578(A) 申请公布日期 2000.10.20
申请号 JP20000078965 申请日期 2000.03.21
申请人 FUJITSU LTD;FUJITSU AUTOM LTD 发明人 FUKAZAWA NORIO;KAWAHARA TOSHISANE;MORIOKA MUNETOMO;OOSAWA MITSUHIRO;NIIMA YASUHIRO;MATSUKI HIROHISA;ONODERA MASANORI;KASAI JUNICHI;MARUYAMA SHIGEYUKI;SAKUMA MASAO;SUZUKI YOSHIMI
分类号 H01L23/12;H01L21/301;H01L21/56;H01L23/52;H01L23/522;H01L23/538;H01L25/065;H01L25/07;H01L25/18;(IPC1-7):H01L21/56 主分类号 H01L23/12
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