| 摘要 |
PROBLEM TO BE SOLVED: To prevent erroneous input of the contents of treatments and, at the same time, to control the treatment by one side of external devices on line. SOLUTION: An in-line controller 1 receives the treatment information set to a main controller 3 and an exposing machine 30 together with recipe flow information. At the time of starting a treatment, the treatment information is displayed on the screen of an in-line panel 2, and, when a worker selects one of the displayed treatment information, the selected treatment information is inputted. The controller 1 gives the substrate treating time received from the exposing machine 20 to the main controller 3. The controller 3 decides the substrate treating time of a treating section 5 based on the given substrate treating time. The in-line controller 1 successively instructs the main controller 3 and exposing machine 20 to start the treatment based on the inputted treatment information and the recipe flow information. |
