| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a thermosensitive flow-rate sensor whose sensitivity is high and reliability is high and to obtain its manufacturing method. SOLUTION: This flow-rate sensor is provided with a flow-rate detecting element 21 in which a heating resistor 4 composed of a thermosensitive resistance film and a temperature compensating resistor 15 are formed on one face of a flat boardlike substrate 1 so as to be separated from each other and in which the flat boardlike substrate in the formation region of the heating resistor 4 and in the formation region of the temperature compensating resistor 15 is removed partially so as to form a diaphragm 14a and a diaphragm 14b. On the basis of the heat transfer phenomenon to a fluid, to be measured, of the heating resistor, the flow rate or the flow velocity of the fluid to be measured is measured. In this case, the flat boardlike substrate 1 in parts other than the formation region of the heating resistor 4 and that of the temperature compensating resistor 15 is removed partially so as to form a cavity 30c and a cavity 30d. Thereby, a diaphragm 20a and a diaphragm 20b are constructed.</p> |
