| 摘要 |
PROBLEM TO BE SOLVED: To prevent gas generation even at high temperature and high vacuum degree, arbitrarily allow folding, and improve reliability, by forming a plurality of metal electrodes on at least one surface of a synthetic resin film having flexibility by deposition and electric plating, and coating the electrodes with a deposition film. SOLUTION: Sandwiching a synthetic resin that has flexibility in the central part and is composed of good heat resistant polyimide or the like. Highly conductive metal electrodes 2, 2... and 2', 2' such as a plurality of copper bars are formed along the longitudinal direction of a synthetic resin film 1 on both surfaces, namely, the front side 1a and the rear side 1b of the film 1. The metal electrodes 2, 2' comprise first metal layers 2a, 2a' formed by deposition and second first metal layers 2b, 2b' formed by electrolytic plating. A gap between the metal electrodes 2, 2' and their periphery are coated with deposition films 3, 3' made of ceramic, and the deposition films 3, 3' interposed between the metal electrodes 2, 2' prevent short circuit of respective electrodes of the metal electrodes 2, 2'.
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