| 摘要 |
PROBLEM TO BE SOLVED: To obtain detailed characteristics stably through a simple structure. SOLUTION: The sensor 11 representing the inner pressure variation of an enclosed container in the form of a strain comprises an insulator layer, i.e., a dielectric layer 21 formed on the surface at the bottom part of a metallic substrate, and a capacitor and interdigital electrodes formed on the surface thereof. The interdigital electrodes comprises a plurality of sets of linear conductors 31A, 31B arranged alternately in parallel wherein every other sets are connected through common electrodes 41A, 41B having one ends connected with I/O terminals 51A, 51B. This structure provides a capacitance between adjacent linear conductors 31A, 31B. When the plate member at the bottom face part is deformed, variation in the capacitance of the interdigital electrodes can be detected from the variation of oscillation frequency. When the bottom face part is a circle or a right polygon having a center, strain can be detected efficiently by forming the interdigital electrodes annularly while matching the center.
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