| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive type sensor in which reliability is enhanced by realizing a structure having no feed through on the joint interface of a substrate, thereby eliminating mixture of a foreign matter into a cavity and preventing erroneous operation due to mixture of the foreign matter. SOLUTION: A semiconductor substrate 1 and a fixed substrate 2 are bonded integrally to form a cavity 17 between a diaphragm part 4 and the fixed substrate 2, and a movable electrode 5 provided at the diaphragm part 4 and a fixed electrode 11 provided on the fixed substrate 2 are connected with external connection electrodes 13, respectively. The semiconductor substrate 1 is provided with a conductive part 7 having a par 7A for isolating the cavity 17 from the outer air, and the conductive part 7 is provided inner and outer connectors 8, 9 on the opposite sides of the isolating part 7A. The fixed electrode 11 is connected to the inner connector 8, and, at the same time, the outer connector 9 is connected with an external connection electrode 15 trough external connection wiring 13.
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