| 摘要 |
PROBLEM TO BE SOLVED: To obtain a laminated element which has a high piezoelectric characteristic and is stabilized in quality, and a method for manufacturing the element. SOLUTION: In a method for manufacturing piezoelectric element, the precursor film of a thin piezoelectric film 403 is crystallized by applying an electric field upon the film 403 in the direction parallel to the direction in which spontaneous polarization is to be caused in the film 403. When this method is used, therefore, a thin piezoelectric film in which spontaneous polarization occurs in the direction of an applied electric field can be formed without selecting its lower electrode and substrate material. |
