发明名称 OPTICAL MODULE, TRANSMITTER, RECEIVER, OPTICAL SWITCH, LIGHT COMMUNICATION APPARATUS, ADD-DROP MULTIPLEXER, AND MANUFACTURE OF OPTICAL MODULE
摘要 PROBLEM TO BE SOLVED: To form an optical module being higher-performance and lower-cost than one heretofore in use by providing a method and construction which make it possible to realize height adjustment for the core layers of a polymer waveguide and a semiconductor device with less characteristic degradation and by fewer manufacturing processes. SOLUTION: An optical integrated circuit or waveguide having a lower clad layer, a core layer, and an upper clad layer is formed on a silicon substrate having a silicon oxide film, and a semiconductor optical element is mounted on an electrode formed on a silicon oxide film at its part excluding the polymer optical waveguide. Besides, the thickness of the lower clad layer is set to 3-9 μm, and the thickness of the core layer is to 5-8 μm to thin the lower clad layer and make the height of the center of the core layer 5-12 μm so as to coincide the center height of the core layer of an optical semiconductor with that of the polymer waveguide. Accordingly, it is all right if d and ncorc are set so that a relation of d>λ/(2π.ncorc2-nsio22)1/2) may be satisfied among the thickness (d) of an oxide film, its refractive index (nsio2), the refractive index (ncorc) of the core layer, and the wavelength (λ) of light which propagates through the optical waveguide.
申请公布号 JP2000294809(A) 申请公布日期 2000.10.20
申请号 JP19990232139 申请日期 1999.08.19
申请人 HITACHI LTD 发明人 IDO TATSUMI;NAGARA TAKAMITSU;ICHIKAWA HIROICHI;KUWABARA AKIRA;KINOSHITA TAIRA
分类号 G02B6/122;G02B6/30;H01L31/0232;H01L33/00;H01L33/48;H01S5/026;H04B10/077;H04B10/079;H04B10/27;H04B10/29 主分类号 G02B6/122
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