PATTERN FORMING MATERIAL AND PATTERN FORMING METHOD BY USING SAME

摘要

PROBLEM TO BE SOLVED: To provide a positive pattern forming method superior in various characteristics, such as sensitivity and resolution and roughness of pattern edges, at the time of forming the pattern by development using an aqueous alkaline solution. SOLUTION: This pattern forming material contains (a) a resin obtained by additionally reacting a binder resin having a carboxylic group and/or a phenolic hydroxyl group with a compound having at least 2 vinyl ether groups in a molecule in the presence of an acid catalyst, and (b) at least a compound to be induced to produce an acid by irradiation with radiation. The above binder resin has a weight average molecular weight(Mw) to a number average molecular weight (Mn) ratio (Mw/Mn) in the range of 1.0-2.0.