| 摘要 |
PROBLEM TO BE SOLVED: To optimize processing procedures in each step of production lots by a method wherein a history of a step processing in which each lot unit is completed is recorded by information processing means, and in the case of the steps, a necessary processing is determined referring to the history. SOLUTION: A one layer process file 21 functions as a parameter file establishing processing procedures of manufacturing equipment. Furthermore, the one layer process file 21 has history information of processings, and in manufacturing equipment, completion or noncompletion of the processing is recorded, and processing completed layers and processing noncompleted layers are classified from a product information film 22. Then, the one layer process file 21 storing only the number of layers constituted as the product information file 22 is examined from the lower layers, and the layer of the layer process file 21 in the process completed information first obtained thin time determined as the layer to be processed in the equipment, and this layer is handled as the process layer. Thus, the processing procedure at each step of lots is optimized. |
