| 摘要 |
PROBLEM TO BE SOLVED: To collect surely dust produced in a discharge chamber, without exerting a bad influence on discharge or light emission, and without dispersing the dust in the atmosphere. SOLUTION: This structure is so composed that dust 14 produced in a discharge chamber 3 is discharged by inert gas IG introduced from one end side of the discharge chamber 3 through a gas outlet 13 formed on the other end side of the discharge chamber 3. In this case, a dust box 15 equipped with a filter 17 is connected to the gas outlet 13.
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