发明名称 GENERATED GAS ANALYZING DEVICE AND GAS INTRODUCTION INTERFACE
摘要 PROBLEM TO BE SOLVED: To introduce gas subject to analysis generated from a gas source in the atmosphere into an analyzing chamber under a vacuum atmosphere quickly, and to introduce components of the gas subject to analysis at high densities independent of the masses. SOLUTION: This device is provided with a double pipe structure comprising an outer pipe 31 and an inner pipe 32 with a smaller diameter. A negative pressure state is generated inside a hollow part of the outer pipe 31 by exhausting from one end to produce vacuum. The other end of the outer pipe 31 communicates to a gas source. One end of the inner pipe 32 communicates to the inside of an analyzing chamber 21, and the other opening end is positioned at the middle of the outer pipe 31. The inner pipe 32 is formed with a capillary pipe for inserting into/extracting from the external pipe 31.
申请公布号 JP2000292319(A) 申请公布日期 2000.10.20
申请号 JP19990100811 申请日期 1999.04.08
申请人 RIGAKU CORP 发明人 ARII TADASHI
分类号 G01N25/20;G01N1/00;G01N27/62;(IPC1-7):G01N1/00 主分类号 G01N25/20
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