THIN FILM MAGNETIC HEAD AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To form a magnetic film on an insulating film with a high precision. SOLUTION: An insulating film 251 supports a coil film 23 and is arranged above a first yoke part 211 and has rising inclination parts 250 on the side of ABSs 13 and 14. A second pole part 220 of a second magnetic film 22 faces a first pole part 210 with a gap film 24 between them. A second yoke part 221 is provided on the insulating film 251 and is connected to the second pole part 220 and is connected to the first yoke part 211 at the rear. With respect to a coil film 27 placed in the top layer, a film thickness H1 of coil parts 271 closest to ABSs 13 and 14 is thinner than a film thickness H3 of a coil part 273 placed in the middle part.