| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for detecting defects in a periodic pattern realizing supersensitive defect detection without causing reduction in detectivity due to moire. SOLUTION: This method has a process S1 for photograpging so as to resolve a processed part, a process S2 for recording a multivalent image obtained by photograpging in a memory, a process S3 for threshold processing the recorded multivalent image by a predetermined slice level, a process S4 for labeling the threshold processed multivalent image according to binary data, a process S5 for seeking an address of a pixel constructing the same label according to a label result obtained by the labeling process, a process S6 for operating a pixel value of the recorded multivalent image corresponding to the address, a process S7 for expanding a representative value based on the operation result, a process S8 for differentiating the expanded representative value and a process S9 for extracting defects by comparison of the differentiated result with the slice level.
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