| 摘要 |
PROBLEM TO BE SOLVED: To obtain a compact capacitor that solves a problem regarding a leakage current or other problems. SOLUTION: The capacitor for an integrated circuit is composed of a conductive plug 7 with an upper surface and an exposed sidewall, and an electrode layer 9 formed on the sidewall of the conductive plug 7. Then, the above side wall includes a layer 3 or 5 made of a material selected form a group consisting of titanium(Ti) and titanium nitride(TiN), and the material of the electrode layer 8 contains neither titanium(Ti) not the titanium nitride(TiN). |
