| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously inspect adjacent chips by extending the needle tip side part of a plurality of probes near an intersection to the same side for a fitting position to a support in the plurality of probe blocks around the intersection of a lattice. SOLUTION: In four probe blocks 32 being extended radially along a boundary line from an intersection, a probe 44 projects in a wind mill shape at the same side from a support 46 due to a probe card. As a result, the four blocks 32 that have been assembled to the same assembly body 34, especially the probe 44 and the support body 46, do not interfere with the assembly operation of the plurality of blocks 32 to a lattice-shaped probe assembly body, thus simultaneously inspecting four adjacent chips via a cross-shaped virtual boundary line. Also, since all the probes 44 of each of the blocks 32 projects toward the same side from the support body 46, the probes 44 are easily assembled to each support body 46. Also, since each of the four blocks 32 that have been combined in a cross is allowed to correspond to one boundary line being extended radially from the intersection, the probes 44 can be more easily assembled to the support body 46.
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