发明名称 Solid-state image detector manufacture
摘要 The method involves manufacturing an image detector including a pixel matrix from a semiconductor material, especially amorphous silicon, which consists of several side by side arranged panels, and which is covered by a passive layer. A scintillation layer is provided for converting an incidenting radiation into a radiation detectable by the pixel matrix. A layer transparent for the radiation emitted by the scintillation layer, is brought up on the passive layer, whereupon the scintillation layer is formed on the layer by evaporation. A foil is preferably used as the layer, which is affixed or is glued on the passive layer.
申请公布号 DE19914701(A1) 申请公布日期 2000.10.19
申请号 DE19991014701 申请日期 1999.03.31
申请人 SIEMENS AG 发明人 SPAHN, MARTIN
分类号 G01T1/20;G01T1/202;G01T1/29;H01L27/00;H01L27/14;H01L27/148;H01L31/09;H04N5/32;(IPC1-7):G01T1/202 主分类号 G01T1/20
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