POSITIONIERVORRICHTUNG MIT KRAFTANTRIEBSSYSTEM FÜR KOMPENSATION VON SCHWERPUNKTSVERSCHIEBUNGEN,申请号DE19966010288-传众专利搜索

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发明名称	POSITIONIERVORRICHTUNG MIT KRAFTANTRIEBSSYSTEM FÜR KOMPENSATION VON SCHWERPUNKTSVERSCHIEBUNGEN
摘要
申请公布号	DE69610288(D1)	申请公布日期	2000.10.19
申请号	DE19966010288	申请日期	1996.05.17
申请人	ASM LITHOGRAPHY B.V., VELDHOVEN	发明人	VAN KIMMENADE, MATHIJS;VAN DER PAL, ADRIANUS;VAN EIJK, JAN
分类号	G03F9/00;G03F7/20;H01L21/027;H01L21/68;(IPC1-7):G03F9/00	主分类号	G03F9/00
代理机构		代理人
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地址

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