| 摘要 |
Slider (20) is moved in X and Y directions between beams (16,18) using ball screws (22,24), based on force applied by servomotors (26,28). Moving beams (16,18) are provided between the X and Y axis fixed guides (12,14). The servomotors are arranged between the guides such that the beams are moved along respective guides contacting the base partially. The fixed guides are arranged in mutually perpendicular positions on the base. By actuating the ball screws using servomotors, the slider is moved in X and Y directions. A set of rails are provided in the each guide, to receive the moving beams. |
