发明名称 METHOD AND DEVICE FOR VERIFYING LATCH UP
摘要 PROBLEM TO BE SOLVED: To provide high-accuracy latch-up verification to the layout data of a semiconductor integrated circuit. SOLUTION: In a method for verifying latch-up, such processes that well areas, transistor areas, and substrate contact areas are extracted from the layout data of a semiconductor integrated circuit and oversize values are individually set from the extracted information are sequentially executed. Then, after oversizes are sequentially executed (oversize areas demarcation) by using the set oversize values, verified results are outputted by regarding the transistor area existing outside an oversized substrate contact area as an error area.
申请公布号 JP2000294650(A) 申请公布日期 2000.10.20
申请号 JP19990098013 申请日期 1999.04.05
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KIMURA SHINICHI;TSUJIKAWA HIROYUKI
分类号 H01L29/00;G06F17/50;H01L21/82;(IPC1-7):H01L21/82 主分类号 H01L29/00
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