Capacitive sensor evaluation method e.g. for pressure sensor, has periodic input signal supplied simultaneously to integration path containing reference capacitor and series circuit containing resistor and sensor capacitor

摘要

The evaluation method uses a symmetrical periodic input signal (U0) supplied to an integration path (1) containing a reference capacitor (4) for providing an intermediate signal (U1) and to a series circuit (2), provided by a resistor (R2) and the sensor capacitor (6), at the resistor side. The intermediate signal is coupled to the opposite end of the series circuit, with the measuring signal (U2) obtained from the connection node between the resistor and the sensor capacitor.