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发明名称
AMMONIUM BORATE CONTAINING COMPOSITIONS FOR STRIPPING RESIDUES FROM SEMICONDUCTOR SUBSTRATES
摘要
申请公布号
EP1044251(A1)
申请公布日期
2000.10.18
申请号
EP19980953564
申请日期
1998.10.14
申请人
ADVANCED CHEMICAL SYSTEMS INTERNATIONAL, INC.
发明人
WOJTCZAK, WILLIAM, A.;GUAN, GEORGE
分类号
G03F7/38;C11D3/04;C11D3/30;C11D3/43;C11D7/10;C11D7/32;C11D11/00;G03F7/42;H01L21/02;H01L21/304;H01L21/306;H01L21/3213;(IPC1-7):C11D3/30;G03C11/12
主分类号
G03F7/38
代理机构
代理人
主权项
地址
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