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发明名称
Member for production device of semi conductor
摘要
申请公布号
GB2307337(B)
申请公布日期
2000.10.18
申请号
GB19960023538
申请日期
1996.11.12
申请人
* SUMITOMO CHEMICAL COMPANY, LIMITED
发明人
YASUSHI * IYECHIKA;TOSHIHISA * KATAMIME;YOSHINOBU * ONO;TOMOYUKI * TAKADA
分类号
H01L33/00;(IPC1-7):H01L21/205;C23C16/34
主分类号
H01L33/00
代理机构
代理人
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