| 摘要 |
The present invention relates to a pulsation suppression device which is interposingly used in a liquid transporting pipe through which a chemical liquid such as a surface washing liquid for washing an IC is transported by a reciprocal pump. The pulsation suppression device of the invention has: a bellows (5) which partitions the interior of the device body (1) having a sealed container-like shape, into a liquid chamber (3) and an gas chamber (4); an operating rod (11) which is reciprocated in interlock relationship with the bellows (5); and an extension and contraction restricting mechanism (51) which, when the bellows (5) extends to a predetermined value, is contacted in parallel with a closed end face (5b) of the bellows, thereby restricting further extension of the bellows (5). Furthermore, the pulsation suppression device of the invention has a guide (21) for making the reciprocal operation of the operating rod (11) coincident with the extension and contraction directions of the bellows (5). The guide (21) is made of a low-friction resin material. According to the invention, pulsation due to the discharge pressure of the transported liquid is absorbed and the amplitude of pulsation is suppressed to a low level. According to the invention, moreover, the bellows (5) used in the pulsation suppression device is prevented from being damaged, and the pulsation suppression function can be stabilized. <IMAGE> |
