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发明名称
Method for manufacturing DRAM cell capacitor
摘要
申请公布号
GB2349015(A)
申请公布日期
2000.10.18
申请号
GB20000004163
申请日期
2000.02.22
申请人
* SAMSUNG ELECTRONICS CO., LTD.
发明人
YOO SANG * HWANG;SANG-HO * SONG;BYUNG-JUN * PARK;TAE YOUNG * CHUNG
分类号
H01L21/02;H01L21/768;H01L21/8242;H01L27/108;(IPC1-7):H01L21/02;H01L21/824
主分类号
H01L21/02
代理机构
代理人
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