发明名称 Electron beam gun
摘要 <p>An electron beam gun contained in a high vacuum chamber comprising a plurality of high voltage surfaces comprising an emitter structure connected through filament leads to an external high voltage source; a metallic shield surrounding the high voltage surfaces, wherein the shield has a hole through which a path of electrons from the emitter structure flow to a target in the vacuum chamber; grounding means for the shield; a crucible; means to focus and direct the path of electrons from the emitter structure to the crucible over an arc passing through the hole. &lt;IMAGE&gt;</p>
申请公布号 EP1045423(A2) 申请公布日期 2000.10.18
申请号 EP20000303143 申请日期 2000.04.13
申请人 THE BOC GROUP, INC. 发明人 HILL, RUSSELL J.
分类号 C23C14/30;H01J3/02;H01J37/06;H01J37/065;H01J37/305;(IPC1-7):H01J37/065 主分类号 C23C14/30
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