发明名称 |
Method and apparatus for producing extreme ultra-violet light for use in photolithography |
摘要 |
A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and a diffuser for capturing a substantial portion of the gas so as to mitigate contamination caused thereby. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like.
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申请公布号 |
US6133577(A) |
申请公布日期 |
2000.10.17 |
申请号 |
US19970794802 |
申请日期 |
1997.02.04 |
申请人 |
ADVANCED ENERGY SYSTEMS, INC. |
发明人 |
GUTOWSKI, ROBERT M.;CALIA, VINCENT;TODD, ALAN M. |
分类号 |
G21G4/00;G03F7/20;G21K5/00;H01L21/027;H01S3/03;H01S3/22;H05G2/00;(IPC1-7):G21G4/00 |
主分类号 |
G21G4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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