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经营范围
发明名称
Scanning electron microscope
摘要
申请公布号
US5731580(B1)
申请公布日期
2000.10.17
申请号
US19960770076
申请日期
1996.12.19
申请人
HITACHI, LTD.
发明人
SATO MITGUGU;SUZUKI NAOMASA
分类号
H01J37/04;H01J37/244;H01J37/28;(IPC1-7):H01J37/256
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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