发明名称 Developer cup
摘要 A developer cup. The developer cup includes a bed. A central spindle is vertically and rotatably coupled to a center of the bed through an end of the central spindle. A chuck is vertically coupled to an end of the central spindle opposite to the bed end. An upper coupling is coupled to the central spindle between the chuck and the bed, wherein the chuck. A lower coupling is moveably coupled to the central spindle between the upper coupling and the bed. The annular cup has an upper wheel and a lower wheel, wherein the upper wheel is aligned with the lower wheel, the upper wheel is coupled to the lower wheel through a plurality of the brackets, and the lower wheel is smaller than the upper wheel.
申请公布号 US6132113(A) 申请公布日期 2000.10.17
申请号 US19990306260 申请日期 1999.05.06
申请人 UNITED INTEGRATED CIRCUITS CORP. 发明人 YU, CHENG-HUNG;LEE, HSIN-MIN;WU, YUNG-CHI;TSAI, HSIN-TING
分类号 G03F7/30;H01L21/00;H01L21/687;(IPC1-7):G03D5/00 主分类号 G03F7/30
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