发明名称 Method of manufacturing photoelectric transducer with improved ultrasonic and purification steps
摘要 A method of manufacturing a photoelectric transducer forms a functional film on a conductive substrate. The method comprises applying ultrasonic cleaning with a cleaning liquid containing water to the conductive substrate, then allowing the surface of the conductive substrate to contact purified water so as to import uniform oxidation and then forming the functional film thereon. The functional film is characterized in being formed with a metal layer as light-reflecting layer, a reflection enhancing layer, and a semiconductor photovoltaic device layer, prepared by a plasma CVD method, comprising a non-monocrystalline material containing silicon atoms as the matrix.
申请公布号 US6132817(A) 申请公布日期 2000.10.17
申请号 US19970822607 申请日期 1997.03.19
申请人 CANON KABUSHIKI KAISHA 发明人 TOKUTAKE, NOBUO;SANO, MASAFUMI;HAYASHI, RYO;HIGASHIKAWA, MAKOTO
分类号 H01L31/04;H01L21/304;H01L31/0392;H01L31/052;H01L31/075;H01L31/20;(IPC1-7):B05D3/10;H05H1/24 主分类号 H01L31/04
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